Compliant MEMS micro-mirror system
Designed and optimized a MEMS micro-mirror with one translational degree of freedom for high-precision optical modulation.
Highlights
- Design Approach:
- Applied the FACT (Freedom and Constraint Topologies) framework to build a compliant mechanism with six wire flexures.
- Integrated two parallel plate actuators to enable vertical displacement with minimal parasitic motion.
- Achieved ~125 µm maximum displacement for fine control.
- Modeling & Simulation:
- Developed stiffness matrix models in MATLAB.
- Verified performance and modal isolation through Finite Element Analysis (FEA).
- Ensured primary resonance at ~2.5 kHz with higher modes >15× above.
- Fabrication Plan:
- Designed for microfabrication via Deep Reactive-Ion Etching (DRIE) and photolithography.
- Included aluminum sputtering for electrode definition and mirror reflectivity.
- Analyzed electrostatic pull-in thresholds to avoid instability.
- Applications:
- Suitable for adaptive optics, laser modulation, and compact optical systems.
- Prioritized speed, precision, and energy efficiency in micro-scale design.